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New Facing Targets Sputtering System - NFTS300-A

Overview | Features | Photos


NFTS load lock system

Load lock chamber for changing substrates while
keeping the deposition chamber under vacuum

NFTS load lock system

Internal mechanism of load lock chamber
for introducing new substrates

NFTS deposition chamber

Deposition chamber open

NFTS deposition

Deposition chamber closed

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