High-precision outgassing measurement apparatus
Features | Specification | Data
Specification
| Dimension | W1100 x D610 x H1100 mm |
| Max. sample size | W60 x D60 x H110 mm |
| Measurement methods | Orifice method (standard orifice diameter = Φ5mm) Build up method (available upon request) |
| Measurement sensitivity | 5x10-10 Pa.m3.s-1 |
| Vacuum chamber material | Electrolytically polished stainless steel |
| Baking temperature | < 250 °C with heating ribbon wire |
| Ultimate pressure | 10-8Pa (after baking) @ evacuated chamber |
| Pumping system | 1 dry pump (backing pump) + 2 turbo (Tandem system) |
| Options (examples) | Customized test chamber for large samples Automatic pump control system Additional load lock chamber, etc. |