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High-precision outgassing measurement apparatus

Features | Specification | Data


DimensionW1100 x D610 x H1100 mm
Max. sample sizeW60 x D60 x H110 mm
Measurement methodsOrifice method (standard orifice diameter = Φ5mm)
Build up method (available upon request)
Measurement sensitivity 5x10-10 Pa.m3.s-1
Vacuum chamber materialElectrolytically polished stainless steel
Baking temperature< 250 °C with heating ribbon wire
Ultimate pressure10-8Pa (after baking) @ evacuated chamber
Pumping system1 dry pump (backing pump) + 2 turbo (Tandem system)
Options (examples)Customized test chamber for large samples
Automatic pump control system
Additional load lock chamber, etc.
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