X-ray Lithography System - Indus-100D
Overview | Features | Design | Control system | Scanning stage | Photos
Overview
Handover of the X-ray scanner installed on BL-7 of the Indus-2 Synchrotron
The X-ray Scanner system for X-ray Lithography using synchrotron radiation was designed for beamline 7 on the Indus-2 Synchrotron. This X-ray scanner can create complex 3D high aspect ratio microstructures, with inclined and conical sidewalls, using the tilt and rotation of the mask and substrate relative to the X-ray beam from the synchrotron source.
Main components
- X-ray Scanner Scanning Stage
- Mask and Substrate Chuck Stage Assemblies
- Tilt and Rotation Module
- Vacuum (Exposure) Chamber and Vacuum Systems
- Support Frame Structure
- PC-based Controller