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X-ray Lithography System - Indus-100D

Overview | Features | Design | Control system | Scanning stage | Photos | Alignment

Control System

The control electronics interface with a computer system which automates the irradiation procedure and monitors signals and interlocks of the beamline system and X-ray scanner during the process.

The control software is coded using the libraries of LabVIEW. This allows the possibility of extensions or modifications to be made by the user.

The snapshots below show some of the computer screens for the main control modes.

X-ray scanner

Exposure Control Mode

X-ray scanner

Motor Control Mode

X-ray scanner

Exposure Status Mode

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