Total Reflection X-ray focusing mirror drive FMP-1000A series
Features | Design | Configuration | Specification | Data | Delivery Record
Specifications (Standard type FMP-1000A)
| Mirror holder | Adoptive mirror size | 100W x 50t x 1000L (mm) | Effective illuminated area | about 800L (mm) |
| Mirror Bender (5-phase stepping motor driven with home position and limit switches) | Maximum Torque loaded (bending moment) | max 1500kgf.cm (147N.m) equal on each side | ||
| Equivalent about 500m radius in the case of standard mirror made of SiO2 | ||||
| Adjustable range | ±20mm | Resolution | 0.125µm/pulse | |
| Position measuring device | Resolution 0.1mm (by potentiometer) | |||
| Mirror positioning stages (5-phase stepping motor driven with home position and limit switches) | Axis | Stroke | Resolution | Repeatability |
| X1,X2 | ±10mm | 0.5µm/pulse | <5µm | |
| Z1,Z2 | ±25mm | 0.2µm/pulse | <5µm | |
| θx * | about ±1.2° | * by displacement of Z1 and Z2 axes | ||
| θz ** | about ±1.2° | ** by displacement of X1 and X2 axes | ||
| Vacuum chamber | Materials | Chamber body | SUS304 | |
| Main flange | A5052P | |||
| Flanges (vacuum seal) | Incoming and outgoing ports | JIS (VG/VF) 100-R (O-ring) | ||
| Main flange | O-ring | |||
| Port for vacuum pump | ICF152 x 1 | |||
| View ports | JIS100 x 3 (lead glass) | |||
| Other service ports | ICF070 x 4 | |||
| Ultimate vacuum pressure | 10-8 Torr or less (depending on pumping capacity of the system) | |||
| Control system | Stepping motor controller | PMC-16A manufactured by Toyama | ||