Graphite Filter - Type U
Specification
Model T-FLT-U-001
| Materials | SUS304, SS, OFHC, Stepping motor, Bellows |
| Helium leak rate | ≤1x10-10Torr l/sec |
| Movement mechanism | Triptych stepping motor with potentiometer - accuracy 0.1mm |
| Stroke | 40mm |
| Surface treatment | Electropolishing - inner surface |
| Cooling | Water cooling - with no water to vacuum joints |
Drawing of Triptych graphite filter