Soft X-ray Reflectometer at Soleil
Features | Specification | Harmonic Reduction System | Internal Photos | Design
Specification
Chamber Adjustment
| Axis | Range | Resolution |
|---|---|---|
| X | >±15mm | 2mm/rev |
| Y | >±15mm | 2mm/rev |
| Z | >±6mm | 0.3mm/rev |
Reflectometer Adjustment
| Axis | Range | Resolution | Reproducibility |
|---|---|---|---|
| X | ±75mm | 0.0195µm/Pulse | >±0.001mm |
| Y | ±75mm | 0.0195µm/Pulse | >±0.001mm |
| Z | ±75mm | 0.0195µm/Pulse | >±0.001mm |
| θ | ±180° | 0.14"/Pulse | >±0.001° |
| 2θ | -20, +200° | 0.14"/Pulse | >±0.001° |
Sample Size: L300mm x W70mm x T50mm - Ø 300mm x 50mm thick