High Precision XY Manipulator
Specifications
| Format | |||||||
|---|---|---|---|---|---|---|---|
| Pressure Range | <1.3x10-11 Pa m³/sec (1x10-10 Torr L/sec) |
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| Vacuum sealing method | Bellows type | ||||||
| Driving mode | Linear actuator by Harmonic Drive Systems Inc | ||||||
| Travel length | X,Y axis ± 5mm both axes | ||||||
| Accuracy | 4µm within 0.2 mm in stroke 7µm in full stroke |
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| Repeatability | ±0.5µm in full stroke | ||||||
| Flange | ICF-152 FT | ||||||
| Weight | approx 18Kg | ||||||
* Special variants available upon request
Click the picture to see the full drawing