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High Precision XY Manipulator

Features | Specification


Pressure Range <1.3x10-11 Pa m³/sec
(1x10-10 Torr L/sec)
Vacuum sealing methodBellows type
Driving modeLinear actuator by Harmonic Drive Systems Inc
Travel lengthX,Y axis ± 5mm both axes
Accuracy4µm within 0.2 mm in stroke
7µm in full stroke
Repeatability±0.5µm in full stroke
FlangeICF-152 FT
Weightapprox 18Kg

* Special variants available upon request

High precision XY manipulator

Click the picture to see the full drawing

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