Rotary Motion Drive for Manipulator MR070 series
Specifications
Format | MR070 | MR070+L | MR070+R |
---|---|---|---|
Freedom of movement | Long rotation | 2-axis (rotary + linear) | 2-axis (rotary + rotary) |
Pressure Range | <1.3x10-11 Pa m3/sec (1x10-10 Torr L/sec) | ||
Vacuum sealing method | Bellows type | ||
Allowable heating temperature | 200 °C | ||
Main body rotary graduation | 1° (vernier scale 0.1°) = 360° rotation | ||
Z-axis (internal shafts) travel | - | 20mm | - |
Z-axis (internal shafts) graduation | - | 0.01mm | - |
Sub rotary (internal shafts) graduation | - | - | 5°=360° rotation |
Flange | ICF070FH** | ||
Weight | 1.8Kg | 2.2Kg | 2.5Kg |
* Other than the standard (such as type with long shaft casing) can be supplied on request.
** "FH" means a drilled hole type ICF flange