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Rotary Motion Drive for Manipulator MR070 series

Features | Specification

Specifications

FormatMR070MR070+LMR070+R
Freedom of movementLong rotation2-axis
(rotary + linear)
2-axis
(rotary + rotary)
Pressure Range <1.3x10-11 Pa m3/sec (1x10-10 Torr L/sec)
Vacuum sealing methodBellows type
Allowable heating temperature200 °C
Main body rotary graduation 1° (vernier scale 0.1°) = 360° rotation
Z-axis (internal shafts) travel-20mm-
Z-axis (internal shafts) graduation -0.01mm-
Sub rotary (internal shafts) graduation --5°=360° rotation
FlangeICF070FH**
Weight1.8Kg2.2Kg2.5Kg

* Other than the standard (such as type with long shaft casing) can be supplied on request.
** "FH" means a drilled hole type ICF flange

Linear Motion Drives

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