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XY Manipulator TM Series

Features | Specification

Specifications

FormatTM-125TM-125+T
Pressure Range <1.3x10-11 Pa m³/sec
(1x10-10 Torr L/sec)
Vacuum sealing methodBellows type
Allowable heating temperature150 °C
Travel distanceBoth X,Y axis ± 12.5mm
Repeat accuracyBoth X,Y <0.01mm
Tilt featureNoYes 7°
FlangeICF070FT**
Weight (g)4.1Kg5.1Kg

* Other non-standard types can be supplied on request
** "FT" means a tapped hole type ICF flange

XY manipulator

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