XY Manipulator TM Series
Specifications
Format | TM-125 | TM-125+T | |||||
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Pressure Range | <1.3x10-11 Pa m³/sec (1x10-10 Torr L/sec) |
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Vacuum sealing method | Bellows type | ||||||
Allowable heating temperature | 150 °C | ||||||
Travel distance | Both X,Y axis ± 12.5mm | ||||||
Repeat accuracy | Both X,Y <0.01mm | ||||||
Tilt feature | No | Yes 7° | |||||
Flange | ICF070FT** | ||||||
Weight (g) | 4.1Kg | 5.1Kg |
* Other non-standard types can be supplied on request
** "FT" means a tapped hole type ICF flange