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High Heat Load - XY Alignment Stage

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high heat load xy slit

X-Y Alignment Stage

This ultra-precise alignment stage is used for the alignment of heavy front end components such as beam absorbers and masks. Both horizontal (X axis) and vertical (Y axis) movement is driven by stepper motors.

The precise positioning, even under heavy load, is achieved by the combination of high stiffness guide rails and high torque stepper motors. The design is compact using a wedge shaped stage which saves vertical space.

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