High Heat Load - XY Alignment Stage
Features | Specification | Drawing | Data
Specification
Type I OTA-00173-A | Type II OTA-00174-A | ||
---|---|---|---|
Travel Length (mm) | X | 50 | 60 |
Y | 20 | 30 | |
Motor type | X | VEXTA 5-phase stepping motor: PK 569 H-B (driver and controller are not included) | |
Y | |||
Home Position Sensor | X | Magnet switch: SONY SET - K2 | |
Y | |||
Position read-out | X | Omron rotary encoder: E6B2-CWZ1X (P/R 2000) covered by radiation box | |
Y | |||
Resolution (mm/step) | X | 0.002 | 0.002 |
Y | 0.0005 | 0.0005 | |
Repeatability (mm) | X | ±0.0005 | ±0.001 |
Y | ±0.001 | ±0.001 | |
Backrush (mm) | X | 0.002 | 0.002 |
Y | 0.002 | 0.002 | |
Pitching, yawing (arcsec) (reproducibility) | X | 14 | 5 |
Y | 14 | 5 | |
Straightness (mm) | X | 0.002 | 0.001 |
Y | 0.002 | 0.001 | |
Maximum Load (kg) | X | 80 | 80 |
Y | 80 | 80 |