New Facing Targets Sputtering System
Overview | Features | Principle | Applications | Product Information
Product Information
Product Information | Box-shaped Source | Rotary Substrate | Stationary Substrate | In-line Substrate | Web-coater
Web-coater Type NFTS
Web-coater Type NFTS
Large-sized plasma sources
Web coater type NFTS equipment is widely available from basic research stage to mass production stage. This system is characteristics of simple mechanism for web transfer without cooling drum for the deposition zone differently from conventional web coaters such as magnetron sputtering systems. This is because NFTS plasma sources are available to separate heating components such as energized electrons and ionized particles in sputtering plasma from the substrate surface due to strong magnetic field zone outside the box shaped plasma space and configuration of target planes and plane. Therefore this system has a more compact vacuum chamber and an easier film conveyance system compared to conventional web coater equipment. Thus this model can be very suitable for prepare thin films on plastic films.