NewSUBARU Synchrotron
Overview | LIGA BL02 | BL05 | BL07 | BL09 and BL10
NewSUBARU LIGA Beamline02
Overview
BL02 is a beamline for X-ray deep lithography with a large exposure area. This can be used for both fabrication processing with high aspect ratio and also with the accuracy below submicron level. The beamline has an X-ray optical system which can select light energy from 2 to 12keV, and less than 2keV. Using newly developed X-ray masks, it has been used to successfully demonstrate processing of high aspect ratio at depth more than 2000μm with the largest work area of A4 size.
Drawing of the LIGA Beamline 02 at NewSUBARU
For more information about the LIGA beamline BL02 at NewSUBARU click here to visit the NewSUBARU website of the University of Hyogo