Focused Ion Beam Time-of-Flight Secondary Ion Mass Spectrometer FIB-TOF-SIMS
FILMER - high resolution surface analysis and microscopy system
Features | Specification | Photos | Data1 | Data2 | Example1 | Example2 | Example3
Features
- Simultaneous SEM observation can be performed on the same field of view of the FIB, which makes it possible to obtain SIMS data with minimum damage.
- Seamless operation from cutting to analysis is easily performed with Windows based control software.
- PC-controlled five-axis UHV manipulator makes the process and analysis flexible.
- Low energy electron beam gun for charge compensation.
- Spatial resolution: <40nm
- Cooling and heating ranges from -120°C to 900°C
- Extension port for an additional ion gun (ICF114)
- Optional: Laser post ionisation (SNMS)
- The most modern and sophisticated FIB made by A&D is applied.
Click here to download a poster about FILMER